Methods and apparatus for nodule control in a titanium-tungsten target
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United States of America Patent
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May 1, 2018
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Dec 31, 2014
filing date -
Dec 31, 2014
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Abstract
Embodiments of the present disclosure include methods and apparatus for controlling titanium-tungsten (TiW) target nodule formation. In some embodiments, a target includes: a source material comprising predominantly titanium (Ti) and tungsten (W), formed from a mixture of titanium powder and tungsten powder, wherein a grain size of a predominant quantity of the titanium powder is less than or equal to a grain size of a predominant quantity of the tungsten powder.
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