Variable adjustment for precise matching of multiple chamber cavity housings

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9960072
APP PUB NO 20170092531A1
SERIAL NO

15050159

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A vertical adjustment assembly is disclosed in order to provide for matching vertical positions of two substrates within separate chambers or cavities of a reaction system for processing of semiconductor substrates. The vertical adjustment assembly, in cooperation with a main lift driver, can provide for a more accurate positioning of the substrates to account for a tolerance stack-up error.

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Patent Owner(s)

  • ASM IP HOLDING B.V.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Coomer, Stephen Dale Chandler, US 3 1656

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