Synthetic quartz glass substrate polishing slurry and manufacture of synthetic quartz glass substrate using the same

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United States of America Patent

PATENT NO 9963634
SERIAL NO

13676213

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Abstract

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In polishing of synthetic quartz glass substrates, a polishing slurry is used comprising (i) an oligopeptide comprising recurring units of pentapeptide: -[valine-proline-glycine-valine-glycine]- and having a molecular weight of 800-150,000 or a copolymer of the pentapeptide with another monomer, and (ii) a colloidal solution.

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Patent Owner(s)

Patent OwnerAddress
SHIN-ETSU CHEMICAL CO LTDTOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Harada, Daijitsu Joetsu, JP 46 74
Matsui, Harunobu Joetsu, JP 28 46
Takeuchi, Masaki Joetsu, JP 174 1242

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