Polarization inspection device

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United States of America Patent

PATENT NO 9970860
SERIAL NO

15381167

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Abstract

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A polarization inspector for inspecting an inspection target, the polarization inspector having a polarization divider for spatially dividing at least a reflected beam of light from the inspection target by irradiating an illumination beam into divided beams of lights mutually different in polarization direction; one or more optical receivers for receiving the divided beams of lights and generating an image signal based on the divided beams of lights; and a processor for calculating at least one of an elliptical azimuth angle, a polarization degree and a polarization component intensity from the image signal.

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Patent Owner(s)

Patent OwnerAddress
YOKOGAWA ELECTRIC CORPORATIONMUSASHINO-SHI TOKYO 180-8750

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Funazaki, Soukichi Tokyo, JP 2 3
Hamaguchi, Toyoaki Tokyo, JP 2 4
Murayama, Kodai Tokyo, JP 1 1
Nohno, Tomohito Tokyo, JP 1 1

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