Importance

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Abstract

A target generating unit outputs a target value signal of a control target, and a position encoding processing unit outputs a position detection signal of the control target. A PID compensator calculates a control amount for causing the control target to follow a target position based on a difference signal between the target value signal and the position detection signal, and outputs it to an adding unit. A disturbance estimation observer outputs the result of estimation of disturbance to the adding unit. The adding unit adds the control amount output of the PID compensator to the output of the disturbance estimation observer to calculate a total control amount. A storage unit stores a control amount during position control to a fixing position as an attitude difference correction amount, and the disturbance estimation observer performs disturbance estimation using a control amount obtained by subtracting a value stored in the storage unit during position control to a moving position from the total control amount.

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