Metal nitride film for thermistor, process for producing same, and thermistor sensor of film type

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United States of America Patent

PATENT NO 9978484
SERIAL NO

14389229

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Abstract

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Provided are a metal nitride film for a thermistor, which has an excellent bending resistance and can be directly deposited on a film or the like without firing, a method for producing the same, and a film type thermistor sensor. The metal nitride film for a thermistor, which consists of a metal nitride represented by the general formula: TixAlyNz (where 0.70≤y/(x+y)≤0.95, 0.4≤z≤0.5, and x+y+z=1), wherein the crystal structure thereof is a hexagonal wurtzite-type single phase, and the peak ratio of the diffraction peak intensity of a-axis orientation (100) relative to the diffraction peak intensity of c-axis orientation (002) (i.e., the diffraction peak intensity of a-axis orientation (100)/the diffraction peak intensity of c-axis orientation (002)) is 0.1 or lower in X-ray diffraction.

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Patent Owner(s)

Patent OwnerAddress
MITSUBISHI MATERIALS CORPORATIONCHIYODA-KU TOKYO 100-8117

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujita, Toshiaki Naka, JP 44 312
Fujiwara, Kazutaka Naka, JP 12 16
Inaba, Hitoshi Naka, JP 33 299
Nagatomo, Noriaki Naka, JP 31 111
Tanaka, Hiroshi Naka, JP 1068 12184

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