Method of material deposition

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United States of America Patent

PATENT NO 9978586
SERIAL NO

15087968

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Abstract

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A method and apparatus for material deposition onto a sample to form a protective layer composed of at least two materials that have been formulated and arranged according to the material properties of the sample.

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Patent Owner(s)

Patent OwnerAddress
FEI COMPANY5350 NE DAWSON CREEK DRIVE HILLSBORO OR 97124

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Franco, Noel Thomas Hillsboro, US 6 12
Miller, Thomas G Portland, US 80 2850
Routh,, Jr Brian Roberts Beaverton, US 11 137
Rue, Chad Portland, US 39 208

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