Pressing apparatus, substrate bonding apparatus and stacked substrate
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United States of America Patent
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May 22, 2018
Issued Date -
N/A
app pub date -
Jun 6, 2014
filing date -
Dec 8, 2011
priority date (Note) -
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Abstract
Moving the substrates quickly, as well as applying a large pressure to the substrates are required. A pressing apparatus for pressing a plurality of substrates stacked on one another, includes: a first stage that supports the plurality of substrates; a second stage that can sandwich the plurality of substrates between the first stage and the second stage; a driving section that moves the first stage towards the second stage so as to sandwich the plurality of substrates; and a pressing section that, when the driving section has made the first stage reach a predetermined position, applies a pressing force to the first stage to press the plurality of substrates between the first stage and the second stage, where the driving section and the pressing section are arranged next to each other so that at least part of the driving section and the pressing section overlaps in the moving direction.
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