Substrate processing apparatus, substrate processing method and storage medium
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United States of America Patent
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May 22, 2018
Issued Date -
N/A
app pub date -
Mar 9, 2016
filing date -
Mar 19, 2015
priority date (Note) -
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status (Latency Note)
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Abstract
A substrate processing apparatus includes a carrier block, an end block for returning a substrate picked up from the carrier block to the carrier block, and a middle block. The middle block includes a plurality of first processing modules stacked one above another, each being configured to process the picked-up substrate and directed to the end block or the substrate returning from the end block to the carrier block; a first transfer mechanism for vertically moving to transfer the substrate that is transferred from one of the carrier and end blocks to the middle block, to a respective one of the first processing modules, and delivering the substrate to the other of the carrier and end blocks; and a second transfer mechanism for transferring the substrate from the other of the carrier and end blocks to the one thereof, without passing through the plurality of first processing modules.
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