Metal oxide-polymer composite particles for chemical mechanical planarization

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United States of America Patent

PATENT NO 9982166
SERIAL NO

15104274

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Abstract

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CMP processes, tools and slurries utilize metal oxide-polymer composite particles that include metal oxide particles and a polymer core. The metal oxide particles are modified with a modifying agent and are partially or fully embedded within the polymer core. Using these processes, tools and slurries can enhance removal rates, reduce defectivity and increase cleanability with respect to comparable systems and substrates.

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Patent Owner(s)

Patent OwnerAddress
CABOT CORPORATIONTWO SEAPORT LANE SUITE 1400 BOSTON MA 02210

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fomitchev, Dmitry Lexington, US 32 189
Hampden-Smith, Mark J Chelmsford, US 197 5284
Kutsovsky, Yakov E Arlington, US 24 223
Prevo, Brian G Portland, US 19 54

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