Modular vaporizer

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9982341
SERIAL NO

14610990

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An improved vaporizer for vaporizing a process fluid is provided. The vaporizer may be assembled from stacked plates and may include one or more plenums with a relatively large wall-area-to-cross-sectional-flow-area ratio. The vaporizer may be equipped with one or more heating elements configured to heat the plenums above the vaporization temperature of the precursor. At least some of the plenums may be heated above the vaporization temperature, but below the Leidenfrost temperature, of the precursor. Multiple stacked plate arrangements may be ganged together in series to achieve complete vaporization, if necessary. The vaporizers may be easily disassembleable for cleaning and maintenance.

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Patent Owner(s)

Patent OwnerAddress
LAM RESEARCH CORPORATION4650 CUSHING PARKWAY FREMONT CA 94538

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Schoepp, Alan M Ben Lomond, US 36 842
Smith, Colin F Half Moon Bay, US 11 177
Sung, Edward Fremont, US 11 43

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