MEMS device

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United States of America Patent

PATENT NO 9983401
SERIAL NO

15156200

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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According to the present invention there is provided a MEMS device comprising, a mirror which is connected to a fixed portion by means of a first and second torsional arm, each of the first and second torsional arms are configured such that they can twist about torsional axes so as to oscillate the mirror about a first oscillation axes, and wherein the first and second torsional arms are each configured to have two or more meanders and wherein the first and second torsional arms are arranged symmetrically relative to the first oscillation axis.

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Patent Owner(s)

  • INTEL CORP.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Abele, Nicolas Demoret, CH 79 297
Gamet, Julien Saint Pierre d'Allevard, FR 18 33
Khechana, Faouzi Preverenges, CH 27 170

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