Ultrasonic sensor

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9987663
APP PUB NO 20150258573A1
SERIAL NO

14641752

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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An ultrasonic sensor includes a substrate on which an opening portion is formed; a vibration plate that is provided on the substrate so as to block the opening portion; and a piezoelectric element including a first electrode, a piezoelectric layer, and a second electrode that are stacked on an opposite side of the opening portion of the vibration plate, in which when a direction in which the first electrode, the piezoelectric layer, and the second electrode are stacked is set to be a Z direction, and a portion that is completely overlapped by the first electrode, the piezoelectric layer, and the second electrode in the Z direction is set to be an active portion, the plural active portions are provided so as to face the one opening portion, and a suppressing portion (column portion) that suppresses vibrations of the vibration plate is provided between the adjacent active portions.

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Patent Owner(s)

Patent OwnerAddress
SEIKO EPSON CORPORATION1-6 SHINJUKU 4-CHOME SHINJUKU-KU TOKYO 160-8801

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kojima, Chikara Matsumoto, JP 45 46

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