Method for processing a carrier and method for transferring a graphene layer

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United States of America Patent

PATENT NO 9987830
SERIAL NO

14828557

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Abstract

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According to various embodiments, a method for processing a carrier may include: forming a layer structure over the carrier, the layer structure including a support layer and a two-dimensional layer over the support layer; wherein the layer structure has at least one opening that exposes a portion of the carrier; forming an auxiliary layer structure, wherein the auxiliary layer structure at least partially covers the layer structure and at least partially fills the at least one opening; and removing the support layer of the layer structure.

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Patent Owner(s)

Patent OwnerAddress
INFINEON TECHNOLOGIES AGAM CAMPEON 1-15 NEUBIBERG 85579

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Koenig, Matthias Regensburg, DE 20 144
Ruhl, Guenther Regensburg, DE 65 796

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