Electrochemical deposition apparatus and methods for controlling the chemistry therein
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United States of America Patent
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Jun 5, 2018
Issued Date -
Jan 8, 2015
app pub date -
Jul 1, 2014
filing date -
Jul 3, 2013
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Abstract
An electrochemical deposition system is described. The electrochemical deposition system includes one or more electrochemical deposition modules arranged on a common platform for depositing one or more metals on a substrate, and a chemical management system coupled to the one or more electrochemical deposition modules. The chemical management system is configured to supply at least one of the one or more electrochemical deposition modules with one or more metal constituents for depositing the one or more metals. The chemical management system can include at least one metal enrichment cell and at least one metal-concentrate generator cell.
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