Debris protection system for reflective optic utilizing gas flow
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United States of America Patent
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Jun 5, 2018
Issued Date -
Oct 16, 2014
app pub date -
Apr 7, 2014
filing date -
Apr 10, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
The present disclosure is directed to a system for protecting a reflective optic and/or any other surface in a plasma-based illumination system from debris by actively flowing gas against the debris flow direction. According to various embodiments, a vacuum chamber is configured to contain a target material, wherein a laser or discharge produced plasma is generated in response to an excitation of the target material. One or more outlets within the chamber are configured to receive gas flowing from a fluidically coupled gas source and further configured to actively flow the gas towards a source of debris and away from the reflective optic or any other protected surface at a controlled flow rate.
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