Apparatus and method for correlating images of a photolithographic mask

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United States of America Patent

PATENT NO 9990737
SERIAL NO

14568681

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Abstract

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An apparatus for correlating at least two images of a photolithographic mask that at least partially overlap, in which the apparatus includes a correlation unit that is provided to use at least one random variation, which is present in the at least two images, of at least one structural element of the photolithographic mask for the correlation of the at least two images.

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Patent Owner(s)

Patent OwnerAddress
CARL ZEISS SMT GMBHRUDOLF-EBER-STRASSE 2 OBERKOCHEN 73447

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Waiblinger, Markus Darmstadt, DE 7 29
Weber, Dieter Rossdorf, DE 28 242

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