Directed self-assembly using trench assisted chemoepitaxy
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jun 5, 2018
Issued Date -
Mar 9, 2017
app pub date -
Sep 7, 2016
filing date -
Sep 7, 2015
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The present disclosure relates to directed self-assembly using trench assisted chemoepitaxy. An example embodiment includes a method of forming a pre-patterned structure for directing a self-assembly of a self-assembling material that includes a first and a second component having different chemical natures. The method includes providing an assembly includes a substrate, a layer of pinning material overlying the substrate, and a resist pattern overlaying the layer of pinning material. The method also includes modifying a chemical nature of an exposed part of a top surface of the layer of pinning material. The method further includes removing the resist pattern. In addition, the method includes attaching a neutral layer to the layer of pinning material.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully