Method and apparatus for backside cleaning of substrates

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United States of America Patent

PATENT NO 9993853
SERIAL NO

14556085

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Abstract

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Embodiments of methods and apparatus for removing particles from a surface of a substrate, such as from the backside of the substrate, are provided herein. In some embodiments, an apparatus for removing particles from a surface of a substrate includes: a substrate handler to expose the surface of the substrate; a particle separator to separate particles from the exposed surface of the substrate; a particle transporter to transport the separated particles; and a particle collector to collect the transported particles.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lew, Jen Sern Singapore, SG 9 39
Nemani, Srinivas D Sunnyvale, US 260 12845
Sundarrajan, Arvind Singapore, SG 86 974
Thirunavukarasu, Sriskantharajah Singapore, SG 48 159

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