Drive device and substrate processing system
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United States of America Patent
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Jun 12, 2018
Issued Date -
N/A
app pub date -
Mar 28, 2014
filing date -
Sep 30, 2011
priority date (Note) -
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status (Latency Note)
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Abstract
A drive device is provided to include: a case; a first motor and a second motor having an output shaft extending along a first axial line in the case and a second axial line parallel to the first axial line in the case, respectively; a first output shaft including a first shaft body and roller followers, the roller followers being engaged at a predetermined reduction gear ratio with the rib of the first motor; a second output shaft including a second shaft body and roller followers, the roller followers being engaged at a predetermined reduction gear ratio with the rib of the second motor; a first sealing member located between the case and the outer peripheral surface of the first shaft body; and a second sealing member located between an inner peripheral surface of the first shaft body and an outer peripheral surface of the second shaft body.
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