Unevenness inspection apparatus and unevenness inspection method
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United States of America Patent
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Jun 12, 2018
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app pub date -
Nov 29, 2016
filing date -
Jun 21, 2011
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Abstract
An unevenness inspection apparatus includes circuitry that is configured to obtain a pickup image of a test object and modify a chroma value of a pixel in the pickup image to correct a gain of the pickup image associated with the pixel for generating a color unevenness inspection image. The circuitry is configured to generate a luminance unevenness inspection image based on the pickup image and calculate an evaluation parameter using both of the color unevenness inspection image and the luminance unevenness inspection image. The circuitry is configured to perform unevenness inspection using the calculated evaluation parameter, which is calculated based on unevenness visibility for both color and luminance.
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