Cantilever pressure sensor with division portions for dividing lever resistance and having piezoresistor element
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United States of America Patent
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Jun 12, 2018
Issued Date -
N/A
app pub date -
Sep 28, 2015
filing date -
Oct 6, 2014
priority date (Note) -
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status (Latency Note)
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Abstract
A pressure sensor includes a sensor main body having a cavity, a cantilever having a lever main body and lever support-portion, which is bent according to a pressure difference between the cavity and sensor outside main body, and a displacement detection unit detects cantilever displacement based on resistance variation in resistance values of the main body-resistance portion formed in the lever main body and lever-resistance portion formed in the lever support-portion. A division groove is formed in the lever support; the division divides the lever-resistance portion into a first resistance portion electrically connected to a detection-electrode in series and second resistance portion closer to other adjacent lever support-portion than the first resistance portion. The first resistance portion of the lever support-portion electrically connected to the detection-electrode via a parallel path of a first path passing through the main body-resistance portion and second path passing through the second resistance portion.
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