Silicon article inspection systems and methods

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United States of America Patent

PATENT NO 9995677
SERIAL NO

15257621

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Abstract

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A method of inspecting a silicon article includes irradiating a silicon article with infrared radiation, transmitting a portion of the infrared radiation through the silicon article, and filtering the infrared radiation transmitted through the silicon article. Image data is acquired from the filtered infrared radiation and an image of the silicon article reconstructed from the image data. Based on the reconstructed image of the silicon article, one or more anomalies defined within the silicon article are identified.

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Patent Owner(s)

  • SENSORS UNLIMITED, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dvonch, Curt Pennington, US 4 0

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