Precise probe placement in automated scanning probe microscopy systems
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United States of America Patent
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Jun 12, 2018
Issued Date -
Aug 27, 2015
app pub date -
Feb 24, 2015
filing date -
Feb 24, 2014
priority date (Note) -
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Abstract
A scanning probe microscope (SPM) system and associated method. The SPM system having a probe adapted to interact with nanoscale features of a sample and scan within a target region to produce a three-dimensional image of that target region, the system maintaining location information for a plurality of features of interest of the sample according to a sample-specific coordinate system, wherein the SPM system is configured to adjust positioning of the probe relative to the sample according to a SPM coordinate system, the SPM system further configured to manage a dynamic relationship between the sample-specific coordinate system and the SPM coordinate system by determining a set of alignment errors between the sample-specific coordinate system and the SPM coordinate system and apply corrections to the SPM coordinate system to offset the determined alignment errors.
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