Substrate holder mounting device and substrate holder container chamber
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United States of America Patent
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Jun 12, 2018
Issued Date -
N/A
app pub date -
Mar 23, 2011
filing date -
Sep 30, 2008
priority date (Note) -
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Abstract
A substrate holder mounting device is provided that is compact and has a simple structure. The substrate holder mounting device according to the present invention is provided with: a first and a second mounting mechanisms (5, 7) that are housed in a chamber and that are respectively configured to be capable of mounting a plurality of substrate holders along a row; row direction drive means that moves the first mounting mechanism to a row direction relatively with respect to the second mounting mechanism; a shifting mechanism (30) that shifts the substrate holders between the first and second mounting mechanisms; and a link-up mechanism that changes positions of the substrate holders in the row direction in the first or second mounting mechanism by a linkage between the shifting mechanism and the above-described row direction drive means.
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