BEOL vertical fuse formed over air gap

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United States of America Patent

PATENT NO 9997454
SERIAL NO

15358701

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Abstract

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A method of forming an electrical device that includes forming a first level including an array of metal lines, wherein an air gap is positioned between the adjacent metal lines. A second level is formed including at least one dielectric layer atop the first level. A plurality of trench structures is formed in the at least on dielectric layer. At least one of the plurality of trench structures opens the air gap. A conductive material is formed within the trenches. The conductive material deposited in the open air gap provides a vertical fuse.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINE CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bergendahl, Marc A Troy, US 99 1216
Demarest, James J Rensselaer, US 41 569
Penny, Christopher J Saratoga Springs, US 178 1663
Waskiewicz, Christopher J Rexford, US 54 500

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