Fabrication method for digital etching of nanometer-scale level structures

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United States of America Patent

PATENT NO 9997555
APP PUB NO 20180040654A1
SERIAL NO

15597222

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Abstract

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A device includes a surface profile optical element, including a substrate and a plurality of bi-layer stacks on the substrate. Each bi-layer stack of the plurality of bi-layer stacks includes a plurality of bi-layers. Each bi-layer of the plurality of bi-layers includes an etch-stop layer and a bulk layer. The etch stop layer includes an etch stop layer index of refraction. The bulk layer includes a bulk layer index of refraction. A ratio of the etch stop layer index of retraction and the bulk layer index of refraction is between 0.75 and 1.25.

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Patent Owner(s)

Patent OwnerAddress
THE GOVERNMENT OF THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OFTHE NAVYONE LIBERTY CTR 875 N RANDOLPH ST SUITE 1425 CHIEF OF NAVAL RESEARCH OFFICE OF COUNSEL (ATTN C ARLINGTON VA 22203

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Christophersen, Marc Berwyn Heights, US 15 80
Phlips, Bernard F Great Falls, US 10 73
Yetzbacher, Michael K Burke, US 8 8

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