Cleaning process that precipitates yttrium oxy-flouride

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United States of America Patent

PATENT NO 9999907
SERIAL NO

15089212

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Abstract

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A method includes immersing an article comprising a yttrium based oxide in an acidic cleaning solution comprising water and 1-10 mol % HF acid. A portion of the yttrium based oxide is dissolved by the HF acid. A yttrium based oxy-fluoride is formed based on a reaction between the HF acid and the dissolved portion of the yttrium based. The yttrium based oxy-fluoride is precipitated onto the article over the yttrium based oxide to form a yttrium based oxy-fluoride coating. The acidic cleaning solution may include a yttrium based salt, which may additionally react with the HF acid to form more of the yttrium based oxy-fluoride.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Yikai Santa Clara, US 28 247
Lee, Chengtsin Union City, US 13 339
Sun, Jennifer Y Mountain View, US 255 11422

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