Polishing head and polishing carrier apparatus having the same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9999957
SERIAL NO

15001410

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A polishing head includes a substrate carrier to suck and to pressurize a substrate, and a retainer ring secured under the substrate carrier, the retainer ring surrounding a circumference of the substrate and including a cooling channel therethrough to circulate a coolant fluid.

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Patent Owner(s)

  • SAMSUNG ELECTRONICS CO., LTD.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Yun-Seok Hwaseong-si, KR 63 638
Chu, Ki-Yeon Hwaseong-si, KR 2 4
Hong, Jin-Suk Hwaseong-si, KR 6 42
Ryu, Chang-Gil Yongin-si, KR 6 34
Song, Geun-Young Suwon-si, KR 2 10

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