Self-calibrating pressure sensor system with pressure sensor and reference sensor that share common sealed chamber

China Patent

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Nov 25, 2015
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Apr 1, 2014
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Apr 4, 2013

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MKS INSTR INC	Not Provided

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GU LEI	-
BART STEPHEN F	-
MINDLIN LEONID	-

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105102951

Self-calibrating pressure sensor system with pressure sensor and reference sensor that share common sealed chamber

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Self-calibrating pressure sensor system with pressure sensor and reference sensor that share common sealed chamber

China Patent

201480018735

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201480018735

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