The deposition method of silicon oxide film and the preparation method of low temperature polycrystalline silicon TFT substrate

China Patent

PATENT NO 105513960
APP PUB NO CN-105513960-A
SERIAL NO

201610054751

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WUHAN HUA XING PHOTOELECTRICITY TECHNOLOGY CORPORATION LTDCN430070 C5 BIOLOGICAL CITY 666 HI TECH AVENUE EAST LAKE DEVELOPMENT ZONE HUBEI WUHAN WUHAN CITY HUBEI PROVINCE 430070

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MA WEIXIN -

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