Switch semiconductor device, preparation method thereof and solid-state phase shifter

China Patent

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Apr 27, 2021
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Oct 24, 2019
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Oct 24, 2019

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HUAWEI TECH CO LTD	Not Provided

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H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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Inventor Name	Address
WU MING	-
ZHANG PENGYU	-
ZHOU YUANTAO	-

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112713145

Switch semiconductor device, preparation method thereof and solid-state phase shifter

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Switch semiconductor device, preparation method thereof and solid-state phase shifter

China Patent

201911019107

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201911019107

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