Electrostatic chuck for semiconductor manufacturing equipment

Number of patents in Portfolio can not be more than 2000

United States of America Design

PATENT NO D802472
SERIAL NO

29553358

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Patent Owner(s)

  • PALL CORPORATION;TOKYO ELECTRON LIMITED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Sasaki, Yasuharu Miyagi, JP 94 1750
Takahashi, Tomoyuki Miyagi, JP 158 2235

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