SEMICONDUCTOR DIFFUSION FURNACE INNER TUBE

European Patent Office Patent

Stats

Aug 11, 1993
Grant Date
Feb 28, 1990
app pub date
Aug 14, 1989
filing date
Aug 15, 1988

priority date (Note)
Granted

status (Note)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Not Available

Loading the Abstract Image... loading....

First Claim

See full text

loading....

all claims.. loading....

Family

Loading Family data... loading....

Patent Owner(s)

Patent Owner	Address
SHIN-ETSU CHEMICAL CO LTD	JPCHIYODA-KU TOKYO 100

International Classification(s)

[Classification Symbol]

[Patents Count]

Inventor(s)

Inventor Name	Address
YAMADA OSAMU	CHUO-KU OSAKA-SHI OSAKA 540-6207
TAWARA YOSHIO	TAKEFU-SHI FUKUI-KEN
HAYASHI MICHIO	NISHINOMIYA-SHI HYOGO 663-8141
MATSUMOTO FUKUJI	NO 2-21 KITAGO 3-CHOME TAKEFU-SHI FUKUI-KEN TAKEFU-SHI FUKUI-KEN

Cited Art Landscape

Load Citation

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
August 11, 1993	EP,0355658,B1 EP0355658B1	Patent
November 22, 1990	EP,0355658,A3 EP0355658A3	SEARCH REPORT
February 28, 1990	EP,0355658,A2 EP0355658A2	APPLICATION PUBLISHED WITHOUT SEARCH REPORT

Full Text

0355658

SEMICONDUCTOR DIFFUSION FURNACE INNER TUBE

Legal Events

Matter Detail

Update Public Data Dismiss Edit

Country:

Application No:

Patent No:

Application Publication No:

Status:

Priority Date:

Filing Date:

Matter Type:

Local Registration No:

Docket No:

Secondary System Identifier (SSI):

Customer Application No:

Filing Type:

Request for Examination Date:

Parent Filing Date:

Complete Specification Date:

PCT Filing Date:

National Entry Date:

First Publication Date:

Allowance Date:

Grant Date:

Grant Publication Date:

Claims:

Independent Claims:

Law Firm:

Renewals Detail

Edit

Applicant:

Applicant ID:

Entity Size:

Renewal Status:

Renewal Base Date:

Renewal Trigger Date:

Patent Searching
Technology Searching
Owner and Inventor Searching
Patent Analytics
Owner Analytics
Attorney Analytics
Inventor Analytics
Technology Analytics
Mobile Searching
Tagging
Advanced Patent Analytics
Advanced Owner Analytics
Mobile Portfolio/Analytics
Detailed Attorney Information
Prosecution analytics
Pre-publication Data
Monthly PAIR Information and Watches
Number of patents in all portfolios	100 (maximum)	1000 (maximum)	2000 (maximum)	Unlimited
Follows in all categories (Watch)	10 (maximum)	50 (maximum)	500 (maximum)	Unlimited
Maximum number of portfolios	5 (maximum)	10 (maximum)	100 (maximum)	Unlimited
Maximum number of comparisons	1 (maximum)	5 (maximum)	20 (maximum)	Unlimited

FREE	$9.95/mo		$39.95/mo	$99.95/mo

PAIR Watch Weekly Update		$2.75/mo/patent		$2.65/mo/patent
PAIR Watch Daily Update		$5.75/mo/patent		$5.55/mo/patent
Upgrade Now	Upgrade Now		Upgrade Now	Upgrade Now

Patent Searching
Technology Searching
Owner and Inventor Searching
Patent Analytics
Owner Analytics
Attorney Analytics
Inventor Analytics
Technology Analytics
Mobile Searching
Tagging
Advanced Patent Analytics
Advanced Owner Analytics
Mobile Portfolio/Analytics
Detailed Attorney Information
Prosecution analytics
Pre-publication Data
Monthly PAIR Information and Watches
Number of patents in all portfolios	100 (maximum)	1000 (maximum)	2000 (maximum)	Unlimited
Watches in all categories (Watch)	10 (maximum)	50 (maximum)	500 (maximum)	Unlimited
Maximum number of portfolios	5 (maximum)	10 (maximum)	100 (maximum)	Unlimited
Maximum number of comparisons	1 (maximum)	5 (maximum)	20 (maximum)	Unlimited

FREE	$9.95/mo		$39.95/mo	$99.95/mo

PAIR Watch Weekly Update		$2.75/mo/patent		$2.65/mo/patent
PAIR Watch Daily Update		$5.75/mo/patent		$5.55/mo/patent
Upgrade Now	Upgrade Now		Upgrade Now	Upgrade Now

Patent Searching
Technology Searching
Owner and Inventor Searching
Patent Analytics
Owner Analytics
Attorney Analytics
Inventor Analytics
Technology Analytics
Mobile Searching
Tagging
Advanced Patent Analytics
Advanced Owner Analytics
Mobile Portfolio/Analytics
Detailed Attorney Information
Prosecution analytics
Pre-publication Data
Monthly PAIR Information and Watches
Number of patents in all portfolios	100 (maximum)	1000 (maximum)	2000 (maximum)	Unlimited
Follows in all categories (Watch)	10 (maximum)	50 (maximum)	500 (maximum)	Unlimited
Maximum number of portfolios	5 (maximum)	10 (maximum)	100 (maximum)	Unlimited
Maximum number of comparisons	1 (maximum)	5 (maximum)	20 (maximum)	Unlimited

SEMICONDUCTOR DIFFUSION FURNACE INNER TUBE

European Patent Office Patent

89115018

Stats

Importance

Abstract

First Claim

Family

Country Designations

Patent Owner(s)

International Classification(s)

Inventor(s)

Cited Art Landscape

Full Text

Legal Events

Matter Detail

Renewals Detail

PATENT NO	0355658
APP PUB NO	EP-0355658-A2
SERIAL NO	89115018
DOCKET NO

Free

Premium

Professional

Enterprise

FREE

$9.95/mo

$39.95/mo

$99.95/mo

Free

Premium

Professional

Enterprise

FREE

$9.95/mo

$39.95/mo

$99.95/mo

Please Confirm Your Upgraded Plan Purchase By Selecting Upgrade Button

Free

Premium

Professional

Enterprise

FREE

$9.95/mo

$39.95/mo

$99.95/mo

Please Confirm Your Upgraded Plan Purchase By Selecting Upgrade Button

89115018

Stats

Importance

Abstract

First Claim

Family

Country Designations

Patent Owner(s)

International Classification(s)

Inventor(s)

Cited Art Landscape

Full Text

Legal Events

Matter Detail

Renewals Detail

Important Notes on Latency of Status data

Important Note on Priority Date data

Only for Granted EP cases