Charged particle device with a gas ion source with high mechanical stability

European Patent Office Patent

PATENT NO 2031633
APP PUB NO EP-2031633-A1
SERIAL NO

07016766

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Patent Owner(s)

Patent OwnerAddress
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUR HALBLEITERPRUFTECHNIK MBHDEAMMERTHALSTR 20 HEIMSTETTEN D-85551

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Inventor Name Address
WINKLER DIETER MÜNCHEN
JASINSKI THOMAS 77830 BÜHLERTAL

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