Hard material layer

European Patent Office Patent

PATENT NO 2355126
APP PUB NO EP-2355126-A2
SERIAL NO

10011124

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Abstract

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A novel functional layer (A) of hard material, applied to a workpiece by arc-physical vapor deposition (PVD) and formed from electrically insulating oxide(s) of one or more of Group IV, V or VI transition metals, aluminum, silicon, iron, cobalt, nickel and yttrium, has a noble gas and/or halogen content of less than 2%. Independent claims are included for: (a) a workpiece selected from tools and machine components, provided with a coating (A) as above; and (b) a method for depositing a layer of material (A'), as for (A) but without restrictions on noble gas and/or halogen content, on a workpiece in a vacuum process plant with an arc evaporation source operated by a DC supply, where a pulsed current supply is superimposed, the target of the source contains a metal and the evaporated metal is converted into oxide in an oxygen-containing reactive gas atmosphere.

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Patent Owner(s)

Patent OwnerAddress
OERLIKON SURFACE SOLUTIONS AG TRÜBBACHCH9477 TRÜBBACH

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Inventor(s)

Inventor Name Address
WIDRIG BENO 7310 BAD RAGAZ
KALSS WOLFGANG FELDKIRCH
RAMM JUERGEN CH-7304 MAIENFELD

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