SPUTTERED TRANSPARENT CONDUCTIVE ALUMINUM DOPED ZINC OXIDE FILMS

European Patent Office Patent

APP PUB NO EP-2904128-A1
SERIAL NO

13776932

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Abstract

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Disclosed are AZO films deposited on a transparent substrate by pulse DC using an oxide target with a composition in the range 0.5-2wt% Al2O3, desirably at temperature above 325°C, resulting in films showing columnar grain structure with columns extending from the top to the bottom of the film, and small lateral grain size (less than 70nm from substrate to top of film). The film has low resistivity at less than 10 Ohm/square at a thickness less than 400nm, resistivity is desirably unchanged by annealing at temperatures of up to 450°C.

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Patent Owner(s)

Patent OwnerAddress
CORNING INCUSNEW YORK UNITED STATES NEW YORK

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Inventor(s)

Inventor Name Address
BELLMAN ROBERT ALAN PAINTED POST NEW YORK 14870
SACHENIK PAUL ARTHUR CORNING NEW YORK
TIAN LILI 19 WEST FIFTH STREET APT 101 CORNING NY 14830 14830
CLARK JEREMY CURTIS ADDISON NY 14801
SIMPSON LYNN BERNARD PAINTED POST NY 14870

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