MEMS DEVICE BUILT ON SUBSTRATE WITH RUTHENIUM BASED CONTACT SURFACE MATERIAL

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Jan 8, 2025
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Feb 8, 2023
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Mar 26, 2021
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Mar 26, 2021

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MENLO MICROSYSTEMS INC	USIRVINE CA

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MINNICK ANDREW	ALBANY NY 12203
ZHU XU	CAMBRIDGE MA
KEIMEL CHRISTOPHER F	NISKAYUNA NY

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DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
January 08, 2025	EP,4126754,B1 EP4126754B1	Patent
February 08, 2023	EP,4126754,A1 EP4126754A1	APPLICATION PUBLISHED WITH SEARCH REPORT

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4126754

MEMS DEVICE BUILT ON SUBSTRATE WITH RUTHENIUM BASED CONTACT SURFACE MATERIAL

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MEMS DEVICE BUILT ON SUBSTRATE WITH RUTHENIUM BASED CONTACT SURFACE MATERIAL

European Patent Office Patent

21720603

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PATENT NO	4126754
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SERIAL NO	21720603
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21720603

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Importance

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First Claim

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