High density probe head for chip testing
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United States of America
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Aug 1, 1989
Issued Date -
N/A
app pub date -
Jan 13, 1988
filing date -
Jan 13, 1988
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A probe head of substantially rectangular construction for use in the testing of chips. The probe head has a body disposed about the perimeter of a substantially transparent fused silica window, probe points extending in a high-density fixed configuration through the fused silica window, and probe leads at one end of which the probe points are formed. The probe leads are disposed in a plurality of layers, such that interior surface, as well as perimeter, probing and testing of chips is facilitated. The probe head also includes a depth-limit plate extending over the edge of the fused silica window and connecting to the probe head body.
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