Reticle pod conversion plate for interfacing with a tool

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United States of America Patent

PATENT NO 11569108
SERIAL NO

16901099

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An illustrative device disclosed herein includes a plate and a reticle pod receiving structure on the front surface of the plate that at least partially bounds a reticle pod receiving area on the front surface. In this example, the back surface of the plate has a pin engagement structure that is adapted to engage a plurality of pins and a fluid flow channel that is adapted to allow fluid communication with an interior region of a reticle pod when the reticle pod is positioned in the reticle pod receiving area.

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Patent Owner(s)

  • GLOBALFOUNDRIES U.S. INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Raga-Barone, Michael Ballston Spa, US 2 1

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