Charged particle beam device and control method of optical system of charged particle beam device

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11222764
APP PUB NO 20200343072A1
SERIAL NO

16827111

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A charged particle beam device includes: a charged particle source; an optical system which acts on a charged particle beam emitted from the charged particle source; a control unit which controls the optical system; and a storage unit which stores previous setting values of the optical system. The optical system includes a first optical element and a second optical element for controlling a state of the charged particle beam to be incident on the first optical element. The control unit obtains an initial value of a setting value of the second optical element based on previous setting values of the second optical element; and changes a state of the charged particle beam by changing the setting value of the second optical element from the obtained initial value and obtains the setting value of the second optical element based on the change in the state of the charged particle beam.

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Patent Owner(s)

  • JEOL LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fukumura, Takuma Tokyo, JP 1 0
Hosogi, Naoki Tokyo, JP 4 2
Iijima, Hirofumi Tokyo, JP 7 16
Nakamichi, Tomohiro Tokyo, JP 5 1
Shimizu, Yuko Tokyo, JP 14 38
Yamazaki, Kazuya Tokyo, JP 17 84

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