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United States of America Patent

PATENT NO 11004714
APP PUB NO 20200266085A1
SERIAL NO

16427417

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A load port includes a door and a mapping sensor. The door moves upward and downward between a closing position for closing an opening connected into a container with multiple stages for placing a plurality of substrates and an opening position for opening the opening. The mapping sensor is disposed integrally with the door and detects a state of the substrates. The mapping sensor includes a light emitting portion and an imaging portion. The light emitting portion emits an imaging light toward the substrates. The imaging portion captures an image of a reflected light of the imaging light.

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First Claim

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Patent Owner(s)

  • 501 TDK CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Iwamoto, Tadamasa Tokyo, JP 20 100
Kudo, Takuya Tokyo, JP 28 82

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