Spindle unit
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United States of America Patent
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-
Jun 13, 2023
Grant Date -
Feb 11, 2021
app pub date -
Jul 29, 2020
filing date -
Aug 6, 2019
priority date (Note) -
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status (Latency Note)
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Abstract
A sealing portion on a lower end of a cover portion of a spindle cover has an upper side surface and a lower side surface that are inclined toward an outer circumferential surface of a spindle. A larger-diameter disk and the outer circumferential surface of the spindle define therebetween a second gap that is narrower than a first gap defined between the spindle and the cover portion. The second gap is effective to prevent a processing waste liquid from entering between the spindle and the spindle cover to prevent a solid waste contained in the processing waste liquid from sticking to the spindle. The spindle is thus prevented from becoming less liable to rotate smoothly due to solid waste deposits.
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