Method of detaching a film of material from a substrate

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United States of America Patent

PATENT NO 6752896
APP PUB NO 20030010430A1
SERIAL NO

09901142

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method of detaching a film of material (2) from the surface (5) of a substrate (1). An outlet (11) of a fluid delivery device (10) is engaged with an aperture (7, 8) in the substrate (1) from the opposite side of the substrate (1) from the surface (5) to which the film (2) is attached. Fluid is passed out of the outlet (11) and through the aperture (7, 8) to generate a detaching force between the film of material (2) and the surface (5) adjacent to the aperture (7, 8).

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Patent Owner(s)

  • ASM TECHNOLOGY SINGAPORE PTE LTD

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chew, Keng Hock Singapore, SG 1 3
Ho, Shu Chuen Singapore, SG 29 145
Kuah, Teng Hock Singapore, SG 33 183
Ong, See Yap Singapore, SG 10 20

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