Process system
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 24, 2001
Grant Date -
N/A
app pub date -
Mar 23, 2000
filing date -
Mar 24, 1999
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A process unit block is disposed at a rear portion on one side of a process station. The process unit block has multi-staged heating and cooling process units. A transferring table is disposed at a center portion of the other side of the process station. Process units are disposed at an upper front portion of the process station. A vertical type conveying unit is disposed at a nearly center portion of the process station. Since a plurality of process stations that have the same structure are connected, the system can be dynamically and effectively expanded or reduced.
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