Wafer stacking structure and manufacturing method thereof

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United States of America Patent

PATENT NO 11967558
APP PUB NO 20220406722A1
SERIAL NO

17396776

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Abstract

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A wafer stack structure includes an interlayer, a first wafer, and a second wafer. The interlayer has a first surface and a second surface opposite to the first surface. The intermediate layer includes a dielectric material layer and a redistribution layer embedded in the dielectric material layer. The first wafer is disposed on the first surface of the interlayer. The second wafer is disposed on the second surface of the interlayer. The second wafer is electrically connected to the first wafer through the redistribution layer of the interlayer.

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Patent Owner(s)

  • POWERCHIP SEMICONDUCTOR MANUFACTURING CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Shou-Zen Hsinchu, TW 76 692
Lin, Jium-Ming Hsinchu, TW 5 17
Lu, Chun-Lin Hsinchu, TW 84 447

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