Semiconductor device and manufacturing method thereof

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United States of America Patent

PATENT NO 5132758
SERIAL NO

07308777

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Abstract

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In a MOSFET of an LDD structure, a side wall is made conductive and connected to a gate through a resistance thereby to cause hot carriers taken into the side wall to be discharged to a gate through the resistance, whereby a channel resistance is prevented from being increased by an effect of carriers accumulated in the side wall. As a result, a reliable MOSFET with a short channel can be provided which is not degraded even if it is used for a long time.

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Patent Owner(s)

  • HITACHI, LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Minami, Masataka Hitachi, JP 97 2519
Nagano, Takahiro Hitachi, JP 146 1572
Wakui, Youkou Tohkai, JP 1 19

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