Elastic wave device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11595023
APP PUB NO 20190260353A1
SERIAL NO

16400051

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An elastic wave device includes a piezoelectric substrate made of LiNbO3, interdigital transducer electrodes on the piezoelectric substrate, and a first dielectric film provided on the piezoelectric substrate and the first dielectric film to cover the IDT electrodes and made of a silicon oxide. The IDT electrodes include a first metal film made of one metal selected from Pt, Cu, Mo, Au, W, and Ta. The Euler angles (ϕ, θ, ψ) of the piezoelectric substrate are (0±5°, −90°≤θ≤−70°, 0°±5°). The metal for the first metal film and the thickness hm/λ (%) match any of the combinations as follows:

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Patent Owner(s)

  • MURATA MANUFACTURING CO LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Daimon, Katsuya Nagaokakyo, JP 87 614
Tamazaki, Daisuke Nagaokakyo, JP 8 49

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