Wafer engine
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United States of America Patent
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Jun 27, 2006
Grant Date -
N/A
app pub date -
Mar 1, 2002
filing date -
Aug 31, 2001
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An integrated system is disclosed for workpiece handling and/or inspection at the front end of a tool. The system comprises a rigid member of unitary construction such as a metal plate which mounts to the front of a tool associated with a semiconductor process. The front end components, including the load port assemblies, prealigners and workpiece handling robot, are mounted to the plate to provide precise and repeatable positioning of the front end components with respect to each other.
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Cited Art Landscape
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