Laser system

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United States of America Patent

PATENT NO 7920616
APP PUB NO 20090067468A1
SERIAL NO

11980172

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method/apparatus may comprise a laser light source which may comprise a solid state seed laser system producing a seed laser output having a nominal center wavelength at a pulse repetition rate; a first and a second gas discharge laser amplifier gain medium each operating at a pulse repetition rate less than that of the seed laser system; a beam divider providing each of the respective first and second amplifier gain mediums with seed laser output pulses; a frequency converter modifying the nominal center wavelength of the output of the seed laser to essentially the nominal center wavelength of the amplifier gain medium; a beam combiner combining the outputs of the respective amplifier gain mediums to provide a light source output having the pulse repetition rate of the seed laser; a coherence buster operating on either or both of the output of the seed laser or amplifier gain mediums.

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Patent Owner(s)

  • CYMER, LLC

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brown, Daniel J W San Diego, US 50 1082
Partlo, William N Poway, US 183 6732
Sandstrom, Richard L Encinitas, US 136 5431

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